Issued Patents All Time
Showing 25 most recent of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981999 | Supplemental energy for low temperature processes | Stephen Moffatt | 2024-05-14 |
| 10837121 | Susceptor support | Richard O. Collins, Errol Antonio C. Sanchez, Mehmet Tugrul Samir | 2020-11-17 |
| 10586744 | Method for optimizing dry absorber efficiency and lifetime in epitaxial applications | — | 2020-03-10 |
| 10557203 | Temperature control system and process for gaseous precursor delivery | — | 2020-02-11 |
| 10500614 | Temperature controlled remote plasma clean for exhaust deposit removal | Martin A. Hilkene, Matthew D. Scotney-Castle | 2019-12-10 |
| 10458040 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2019-10-29 |
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao +1 more | 2018-11-06 |
| 10119194 | Indexed gas jet injector for substrate processing system | — | 2018-11-06 |
| 10043870 | Method and structure to improve film stack with sensitive and reactive layers | Zhiyuan Ye, Xinyu BAO, Errol Antonio C. Sanchez, Keun-Yong Ban | 2018-08-07 |
| 9857028 | Chamber pressure control apparatus for chemical vapor deposition systems | — | 2018-01-02 |
| 9845550 | Upper dome with injection assembly | Paul Brillhart, Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack +5 more | 2017-12-19 |
| 9799737 | Method for forming group III/V conformal layers on silicon substrates | Xinyu BAO, Errol Antonio C. Sanchez, Zhiyuan Ye | 2017-10-24 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more | 2017-09-19 |
| 9695508 | Liner assembly for chemical vapor deposition chamber | Mehmet Tugrul Samir, Nyi O. Myo | 2017-07-04 |
| 9534295 | Chamber pressure control apparatus for chemical vapor deposition systems | — | 2017-01-03 |
| 9530888 | MOCVD growth of highly mismatched III-V CMOS channel materials on silicon substrates | Keun-Yong Ban, Zhiyuan Ye, Errol Antonio C. Sanchez, Xinyu BAO | 2016-12-27 |
| 9512520 | Semiconductor substrate processing system | Errol Antonio C. Sanchez, Satheesh Kuppurao | 2016-12-06 |
| 9476144 | Method and apparatus for the selective deposition of epitaxial germanium stressor alloys | Errol Antonio C. Sanchez | 2016-10-25 |
| 9443728 | Accelerated relaxation of strain-relaxed epitaxial buffers by use of integrated or stand-alone thermal processing | Swaminathan Srinivasan, Atif Noori | 2016-09-13 |
| 9406538 | Indexed inline substrate processing tool | — | 2016-08-02 |
| 9396909 | Gas dispersion apparatus | — | 2016-07-19 |
| 9347696 | Compact ampoule thermal management system | Errol Antonio C. Sanchez, Kenric Choi, Marcel E. Josephson, Dennis L. Demars | 2016-05-24 |
| 9322097 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao +1 more | 2016-04-26 |
| 9279604 | Compact ampoule thermal management system | Errol Antonio C. Sanchez, Kenric Choi, Marcel E. Josephson, Dennis L. Demars, Emre Cuvalci +1 more | 2016-03-08 |
| 9159554 | Structure and method of forming metamorphic heteroepi materials and III-V channel structures on si | Errol Antonio C. Sanchez, Xinyu BAO, Wonseok Lee, Zhiyuan Ye | 2015-10-13 |