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Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah, Zhiyuan Ye |
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Plasma preclean system for cluster tool |
Songjae Lee, Masato Ishii, Martin TRUEMPER, Martin Jeffrey Salinas, Yong ZHENG +5 more |
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| 12324061 |
Epitaxial deposition chamber |
Shu-Kwan LAU, Brian H. Burrows, Zhiyuan Ye, Enle CHOO, Danny D. WANG +5 more |
2025-06-03 |
| 12188148 |
Multi-layer EPI chamber body |
Shu-Kwan LAU, Zhiyuan Ye, Brian H. Burrows |
2025-01-07 |
| 12037701 |
Multi-thermal CVD chambers with shared gas delivery and exhaust system |
Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Herman Diniz +4 more |
2024-07-16 |
| 11784076 |
Substrate transfer mechanism to reduce back-side substrate contact |
Masato Ishii, Richard Giljum, Alexander Berger |
2023-10-10 |
| 11781212 |
Overlap susceptor and preheat ring |
Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah, Zhiyuan Ye |
2023-10-10 |
| 11424149 |
Substrate transfer mechanism to reduce back-side substrate contact |
Masato Ishii, Richard Giljum, Alexander Berger |
2022-08-23 |
| 11171023 |
Diode laser for wafer heating for EPI processes |
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2021-11-09 |
| 10837121 |
Susceptor support |
Errol Antonio C. Sanchez, David K. Carlson, Mehmet Tugrul Samir |
2020-11-17 |
| 10755955 |
Substrate transfer mechanism to reduce back-side substrate contact |
Masato Ishii, Richard Giljum, Alexander Berger |
2020-08-25 |
| 10269614 |
Susceptor design to reduce edge thermal peak |
Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more |
2019-04-23 |
| 9613835 |
Heating lamp assembly |
Nyi O. Myo |
2017-04-04 |
| 9297164 |
VIP roofing insulation |
Dwight Musgrave, Kenneth C. Areskog |
2016-03-29 |
| D716240 |
Lower chamber liner |
Shu-Kwan LAU, Mehmet Tugrul Samir, Anzhong Chang, Paul Brillhart |
2014-10-28 |
| D711331 |
Upper chamber liner |
Shu-Kwan LAU, Mehmet Tugrul Samir, Anzhong Chang, Paul Brillhart |
2014-08-19 |
| 8747560 |
System and method for pedestal adjustment |
Kailash Kiran Patalay, Jean R. Vatus, Zhepeng CONG |
2014-06-10 |
| 8496780 |
Apparatus for the deposition of high dielectric constant films |
Bobby Ronsse, Craig Metzner |
2013-07-30 |
| 8441640 |
Non-contact substrate support position sensing system and corresponding adjustments |
Kailash Kiran Patalay, Jean R. Vatus, Zhepeng CONG |
2013-05-14 |
| 8398777 |
System and method for pedestal adjustment |
Kailash Kiran Patalay, Jean R. Vatus, Zhepeng CONG |
2013-03-19 |
