Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334318 | Plasma preclean system for cluster tool | Songjae Lee, Masato Ishii, Richard O. Collins, Martin Jeffrey Salinas, Yong ZHENG +5 more | 2025-06-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334318 | Plasma preclean system for cluster tool | Songjae Lee, Masato Ishii, Richard O. Collins, Martin Jeffrey Salinas, Yong ZHENG +5 more | 2025-06-17 |