Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385159 | In-situ epi growth rate control of crystal thickness micro-balancing sensor | Zhepeng CONG, Zhiyuan Ye, Avinash Shervegar, Ala Moradian | 2025-08-12 |
| 12324061 | Epitaxial deposition chamber | Shu-Kwan LAU, Brian H. Burrows, Zhiyuan Ye, Richard O. Collins, Danny D. WANG +5 more | 2025-06-03 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Flora Fong-Song CHANG, Maxim D. SHAPOSHNIKOV +10 more | 2025-01-14 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Flora Fong-Song CHANG, Vilen K. NESTOROV +10 more | 2024-12-10 |
| 11848202 | Growth monitor system and methods for film deposition | Zhepeng CONG, Mostafa BAGHBANZADEH, Tao SHENG | 2023-12-19 |
| 11261538 | In-situ temperature mapping for epi chamber | Ala Moradian, Zuoming ZHU, Patricia M. Liu, Shu-Kwan LAU, Flora Fong-Song CHANG +1 more | 2022-03-01 |