Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more | 2025-01-14 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 11860973 | Method and system for foreline deposition diagnostics and control | Ala Moradian, Martin A. Hilkene, Zuoming ZHU, Errol Antonio C. Sanchez, Bindusagar Marath Sankarathodi +1 more | 2024-01-02 |
| 11635338 | Rapid chamber vacuum leak check hardware and maintenance routine | Martin A. Hilkene | 2023-04-25 |