Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428731 | Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability | Zuoming ZHU, Shu-Kwan LAU, John Tolle, Manjunath Subbanna, Martin Jeffrey Salinas +3 more | 2025-09-30 |
| 12385159 | In-situ epi growth rate control of crystal thickness micro-balancing sensor | Zhepeng CONG, Zhiyuan Ye, Avinash Shervegar, Enle CHOO | 2025-08-12 |
| 12354855 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Zhepeng CONG, Tao SHENG, Nimrod SMITH, Ashur J. ATANOS, Vinh N. TRAN | 2025-07-08 |
| 12334341 | Chamber body feedthrough for in chamber resistive heating element | Brian H. Burrows, Zuoming ZHU, Chia Cheng Chin | 2025-06-17 |
| 12326282 | Cooling flow in substrate processing according to predicted cooling parameters | Umesh M. Kelkar, Orlando Trejo, Elizabeth Neville, Karthik Ramanathan | 2025-06-10 |
| 12324061 | Epitaxial deposition chamber | Shu-Kwan LAU, Brian H. Burrows, Zhiyuan Ye, Richard O. Collins, Enle CHOO +5 more | 2025-06-03 |
| 12228905 | Eco-efficiency monitoring and exploration platform for semiconductor manufacturing | Umesh M. Kelkar, Elizabeth Neville, Orlando Trejo, Sergey Meirovich, Kartik Shah +1 more | 2025-02-18 |
| 12221696 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Zhepeng CONG, Tao SHENG, Nimrod SMITH, Ashur J. ATANOS, Vinh N. TRAN | 2025-02-11 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Flora Fong-Song CHANG, Maxim D. SHAPOSHNIKOV +10 more | 2025-01-14 |
| 12183559 | Apparatus for temperature control in a substrate processing chamber | Vishwas Kumar Pandey, Colin John Dickinson, Dinkesh HUDERI SOMANNA, Kartik Shah | 2024-12-31 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Flora Fong-Song CHANG, Vilen K. NESTOROV +10 more | 2024-12-10 |
| 12091749 | Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Kartik Shah +4 more | 2024-09-17 |
| 12060651 | Chamber architecture for epitaxial deposition and advanced epitaxial film applications | Tetsuya Ishikawa, Swaminathan Srinivasan, Kartik Shah, Manjunath Subbanna, Matthias Bauer +2 more | 2024-08-13 |
| 12018372 | Gas injector for epitaxy and CVD chamber | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Kartik Shah +4 more | 2024-06-25 |
| 12001197 | Eco-efficiency (sustainability) dashboard for semiconductor manufacturing | Elizabeth Neville, Umesh M. Kelkar, Mark Denome, Prashanth Kothnur, Karthik Ramanathan +3 more | 2024-06-04 |
| 11860973 | Method and system for foreline deposition diagnostics and control | Martin A. Hilkene, Zuoming ZHU, Errol Antonio C. Sanchez, Bindusagar Marath Sankarathodi, Patricia M. Liu +1 more | 2024-01-02 |
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | James L'HEUREUX, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan, Lin Zhang +4 more | 2023-09-26 |
| 11752035 | Ultrasonic needles and transducer assemblies formed of non-metal materials or a combination of materials | Brian D. McCary, Toh Seng Goh, Matthew J. Fitzgerald | 2023-09-12 |
| 11733081 | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system | Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi RAJEEVAN, Zuoming ZHU, Errol Antonio C. Sanchez +1 more | 2023-08-22 |
| 11261538 | In-situ temperature mapping for epi chamber | Zuoming ZHU, Patricia M. Liu, Shu-Kwan LAU, Flora Fong-Song CHANG, Enle CHOO +1 more | 2022-03-01 |
| 11162168 | Substrate positioning apparatus and methods | Travis Tesch | 2021-11-02 |
| 11036125 | Substrate positioning apparatus and methods | Travis Tesch | 2021-06-15 |
| 10995419 | Methods and apparatus for gallium nitride deposition | Brian H. Burrows, Kartik Shah, Shu-Kwan LAU | 2021-05-04 |
| 10932948 | Ultrasonic needles and transducer assemblies formed of non-metal materials or a combination of materials | Brian D. McCary, Toh Seng Goh, Matthew J. Fitzgerald | 2021-03-02 |
| 10930530 | Methods and apparatus for wafer temperature measurement | Ji-Dih HU | 2021-02-23 |