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Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability |
Zuoming ZHU, Ala Moradian, Shu-Kwan LAU, John Tolle, Martin Jeffrey Salinas +3 more |
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| 12091749 |
Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet |
Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Ala Moradian, Kartik Shah +4 more |
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| 12060651 |
Chamber architecture for epitaxial deposition and advanced epitaxial film applications |
Tetsuya Ishikawa, Swaminathan Srinivasan, Kartik Shah, Ala Moradian, Matthias Bauer +2 more |
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Gas injector for epitaxy and CVD chamber |
Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Ala Moradian, Kartik Shah +4 more |
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Light emitting diode assembly using thermal pyrolytic graphite for thermal management |
Wei Fan, EELCO ARMINAK GALESTIEN, Creighton Tomek |
2019-09-03 |
