Issued Patents All Time
Showing 25 most recent of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428731 | Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability | Zuoming ZHU, Ala Moradian, Shu-Kwan LAU, Manjunath Subbanna, Martin Jeffrey Salinas +3 more | 2025-09-30 |
| 12406846 | Method for depositing boron and gallium containing silicon germanium layers | Lucas Petersen Barbosa Lima, Joe Margetis, Rami Khazaka, Qi Xie | 2025-09-02 |
| 12363960 | Method for depositing a Group IV semiconductor and related semiconductor device structures | Joe Margetis | 2025-07-15 |
| 12262559 | Monolithic complementary field-effect transistors having carbon-doped release layers | Andrew Cockburn, Vanessa Pena, Daniel Philippe Cellier, Thomas Kirschenheiter, Wei Hong +3 more | 2025-03-25 |
| 12252785 | Method for cleaning quartz epitaxial chambers | Gregory Deye, Joseph P. Margetis | 2025-03-18 |
| 12195876 | Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly | Joseph P. Margetis | 2025-01-14 |
| 12040200 | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus | Shiva Rajavelu, Rich McCartney | 2024-07-16 |
| 11901179 | Method and device for depositing silicon onto substrates | Robert Vyne | 2024-02-13 |
| 11814747 | Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly | Joseph P. Margetis | 2023-11-14 |
| 11764058 | Three-color 3D DRAM stack and methods of making | Arvind Kumar, Mahendra Pakala, Ellie Yieh, Thomas Kirschenheiter, Anchuan Wang +1 more | 2023-09-19 |
| 11557474 | Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation | Joe Margetis, David Kohen | 2023-01-17 |
| 11374112 | Method for depositing a group IV semiconductor and related semiconductor device structures | Joe Margetis | 2022-06-28 |
| 11264255 | Pre-clean chamber and process with substrate tray for changing substrate temperature | Eric Hill | 2022-03-01 |
| 11168395 | Temperature-controlled flange and reactor system including same | Sonti Sreeram, Joe Margetis, Junwei Su | 2021-11-09 |
| 11053585 | Reactor system for sublimation of pre-clean byproducts and method thereof | Eric Hill | 2021-07-06 |
| 11018002 | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures | Joe Margetis | 2021-05-25 |
| 11004977 | Method for depositing a group IV semiconductor and related semiconductor device structures | Joe Margetis | 2021-05-11 |
| 10787741 | Method and system for in situ formation of gas-phase compounds | Eric Hill, Jereld Lee Winkler | 2020-09-29 |
| 10685834 | Methods for forming a silicon germanium tin layer and related semiconductor device structures | Nupur Bhargava, Joe Margetis | 2020-06-16 |
| 10612136 | Temperature-controlled flange and reactor system including same | Sonti Sreeram, Joe Margetis, Junwei Su | 2020-04-07 |
| 10541333 | Method for depositing a group IV semiconductor and related semiconductor device structures | Joe Margetis | 2020-01-21 |
| 10535516 | Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures | David Kohen, Nupur Bhargava, Vijay D'Costa | 2020-01-14 |
| 10519541 | Reactor system for sublimation of pre-clean byproducts and method thereof | Eric Hill | 2019-12-31 |
| 10510536 | Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber | David Kohen | 2019-12-17 |
| 10446393 | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures | Nupur Bhargava, Joe Margetis, Matthew G. Goodman, Robert Vyne | 2019-10-15 |