Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406846 | Method for depositing boron and gallium containing silicon germanium layers | Lucas Petersen Barbosa Lima, John Tolle, Rami Khazaka, Qi Xie | 2025-09-02 |
| 12363960 | Method for depositing a Group IV semiconductor and related semiconductor device structures | John Tolle | 2025-07-15 |
| 12057314 | Methods for silicon germanium uniformity control using multiple precursors | Amir Kajbafvala, Peter Westrom, Xin Sun, Caleb Miskin, Yen Lin Leow +1 more | 2024-08-06 |
| 11996289 | Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods | Amir Kajbafvala, Xin Sun, David Kohen, Dieter Pierreux | 2024-05-28 |
| 11557474 | Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation | John Tolle, David Kohen | 2023-01-17 |
| 11374112 | Method for depositing a group IV semiconductor and related semiconductor device structures | John Tolle | 2022-06-28 |
| 11168395 | Temperature-controlled flange and reactor system including same | Sonti Sreeram, John Tolle, Junwei Su | 2021-11-09 |
| 11018002 | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures | John Tolle | 2021-05-25 |
| 11004977 | Method for depositing a group IV semiconductor and related semiconductor device structures | John Tolle | 2021-05-11 |
| 10685834 | Methods for forming a silicon germanium tin layer and related semiconductor device structures | Nupur Bhargava, John Tolle | 2020-06-16 |
| 10612136 | Temperature-controlled flange and reactor system including same | Sonti Sreeram, John Tolle, Junwei Su | 2020-04-07 |
| 10541333 | Method for depositing a group IV semiconductor and related semiconductor device structures | John Tolle | 2020-01-21 |
| 10446393 | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures | Nupur Bhargava, John Tolle, Matthew G. Goodman, Robert Vyne | 2019-10-15 |
| 10388509 | Formation of epitaxial layers via dislocation filtering | John Tolle | 2019-08-20 |
| 10262859 | Process for forming a film on a substrate using multi-port injection assemblies | John Tolle, Gregory Bartlett, Nupur Bhargava | 2019-04-16 |
| 9905420 | Methods of forming silicon germanium tin films and structures and devices including the films | John Tolle | 2018-02-27 |
| 9892913 | Radial and thickness control via biased multi-port injection settings | John Tolle, Gregory Bartlett, Nupur Bhargava | 2018-02-13 |
| 9647114 | Methods of forming highly p-type doped germanium tin films and structures and devices including the films | John Tolle | 2017-05-09 |