Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428726 | Gas injection system and reactor system including same | Tomas Hernandez Acosta, Alexandros T. Demos, Peter Westrom, Amir Kajbafvala, Ali Moballegh | 2025-09-30 |
| 12394659 | Susceptors with film deposition control features | Shujin Huang, Junwei Su, Xing Lin, Alexandros T. Demos, Rutvij Naik +6 more | 2025-08-19 |
| 12362174 | Method and wafer processing furnace for forming an epitaxial stack on a plurality of substrates | Steven R. A. Van Aerde, Wilco Verweij, Bert Jongbloed, Dieter Pierreux, Kelly Houben +4 more | 2025-07-15 |
| 12173404 | Method of depositing epitaxial material, structure formed using the method, and system for performing the method | Amir Kajbafvala | 2024-12-24 |
| 12163227 | Film deposition systems and methods | Amir Kajbafvala, Yanfu Lu | 2024-12-10 |
| 12057314 | Methods for silicon germanium uniformity control using multiple precursors | Amir Kajbafvala, Peter Westrom, Joe Margetis, Xin Sun, Yen Lin Leow +1 more | 2024-08-06 |
| 11959173 | Methods of forming structures, semiconductor processing systems, and semiconductor device structures | Amir Kajbafvala, Yanfu Lu, Robinson James | 2024-04-16 |
| 11747209 | System and method for thermally calibrating semiconductor process chambers | Yen Lin Leow, Hyeongeu Kim | 2023-09-05 |
| 10732046 | System and method for thermally calibrating semiconductor process chambers | Yen Lin Leow, Hyeongeu Kim | 2020-08-04 |