Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12043899 | Reactor system and method to reduce residue buildup during a film deposition process | Tom Kirschenheiter, Eric Hill, Mark Hawkins, Loren Jacobs | 2024-07-23 |
| 11747209 | System and method for thermally calibrating semiconductor process chambers | Yen Lin Leow, Caleb Miskin | 2023-09-05 |
| 11390950 | Reactor system and method to reduce residue buildup during a film deposition process | Tom Kirschenheiter, Eric Hill, Mark Hawkins, Loren Jacobs | 2022-07-19 |
| 10943771 | Methods for thermally calibrating reaction chambers | Loren Jacobs, Peter Westrom | 2021-03-09 |
| 10732046 | System and method for thermally calibrating semiconductor process chambers | Yen Lin Leow, Caleb Miskin | 2020-08-04 |
| 10643826 | Methods for thermally calibrating reaction chambers | Loren Jacobs, Peter Westrom | 2020-05-05 |