Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12043899 | Reactor system and method to reduce residue buildup during a film deposition process | Hyeongeu Kim, Tom Kirschenheiter, Eric Hill, Loren Jacobs | 2024-07-23 |
| 11885019 | Susceptor with ring to limit backside deposition | Matthew G. Goodman, Shawn George Thomas | 2024-01-30 |
| 11390950 | Reactor system and method to reduce residue buildup during a film deposition process | Hyeongeu Kim, Tom Kirschenheiter, Eric Hill, Loren Jacobs | 2022-07-19 |
| 11085112 | Susceptor with ring to limit backside deposition | Matthew G. Goodman, Shawn George Thomas | 2021-08-10 |
| 10604847 | Gas distribution system, reactor including the system, and methods of using the same | Bradley Leonard Halleck, Tom Kirschenheiter, Benjamin Hossa, Clay Pottebaum, Claudio Miskys | 2020-03-31 |
| 10167557 | Gas distribution system, reactor including the system, and methods of using the same | Bradley Leonard Halleck, Tom Kirschenheiter, Benjamin Hossa, Clay Pottebaum, Claudio Miskys | 2019-01-01 |
| 8360001 | Process for deposition of semiconductor films | Michael A. Todd | 2013-01-29 |
| 8088225 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton +7 more | 2012-01-03 |
| 8047706 | Calibration of temperature control system for semiconductor processing chamber | Matthew G. Goodman, Ravinder Aggarwal, Michael Eugene Givens, Eric Hill, Gregory Bartlett | 2011-11-01 |
| 7655093 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more | 2010-02-02 |
| 7648579 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton +7 more | 2010-01-19 |
| 7585752 | Process for deposition of semiconductor films | Michael A. Todd | 2009-09-08 |
| 7186298 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more | 2007-03-06 |
| 6879777 | Localized heating of substrates using optics | Matthew G. Goodman, Tony Keeton, Ravinder Aggarwal | 2005-04-12 |
| 6861321 | Method of loading a wafer onto a wafer holder to reduce thermal shock | Tony Keeton, Michael Stamp | 2005-03-01 |
| 6821825 | Process for deposition of semiconductor films | Michael A. Todd | 2004-11-23 |
| 6709267 | Substrate holder with deep annular groove to prevent edge heat loss | Matthew G. Goodman, Loren Jacobs | 2004-03-23 |
| 6692576 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more | 2004-02-17 |
| 6491757 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more | 2002-12-10 |
| 6464792 | Process chamber with downstream getter plate | John F. Wengert, Loren Jacobs, Michael Halpin, Derrick W. Foster, Cornelius A. van der Jeugd +1 more | 2002-10-15 |
| 6454866 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more | 2002-09-24 |
| 6343183 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more | 2002-01-29 |
| 6203622 | Wafer support system | Michael Halpin, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more | 2001-03-20 |
| 6131061 | Apparatus and method for preventing underdigging of a work machine | Lee R. Denbraber, John D. Duffy, Steven J. Zmuda | 2000-10-10 |
| 6126744 | Method and system for adjusting semiconductor processing equipment | Robert Vyne, Cornelius A. van der Jeugd | 2000-10-03 |