Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8088225 | Substrate support system for reduced autodoping and backside deposition | Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton, Mark Hawkins +7 more | 2012-01-03 |
| 7648579 | Substrate support system for reduced autodoping and backside deposition | Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton, Mark Hawkins +7 more | 2010-01-19 |
| 6325858 | Long life high temperature process chamber | John F. Wengert, Ivo Raaijmakers, Mike Halpin, Loren Jacobs, Michael J. Meyer +4 more | 2001-12-04 |