| 7655093 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, Cornelius A. van der Jeugd +5 more |
2010-02-02 |
| 7186298 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, Cornelius A. van der Jeugd +1 more |
2007-03-06 |
| 6692576 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, Cornelius A. van der Jeugd +1 more |
2004-02-17 |
| 6491757 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, Cornelius A. van der Jeugd +5 more |
2002-12-10 |
| 6464792 |
Process chamber with downstream getter plate |
Loren Jacobs, Michael Halpin, Derrick W. Foster, Cornelius A. van der Jeugd, Robert Vyne +1 more |
2002-10-15 |
| 6454866 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, Cornelius A. van der Jeugd +5 more |
2002-09-24 |
| 6343183 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, Cornelius A. van der Jeugd +5 more |
2002-01-29 |
| 6325858 |
Long life high temperature process chamber |
Ivo Raaijmakers, Mike Halpin, Loren Jacobs, Michael J. Meyer, Frank B. M. Van Bilsen +4 more |
2001-12-04 |
| 6203622 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, Cornelius A. van der Jeugd +1 more |
2001-03-20 |
| 6113702 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, Cornelius A. van der Jeugd +5 more |
2000-09-05 |
| 6093252 |
Process chamber with inner support |
Loren Jacobs, Michael Halpin, Derrick W. Foster, Cornelius A. van der Jeugd, Robert Vyne +1 more |
2000-07-25 |
| 6086680 |
Low-mass susceptor |
Derrick W. Foster, Cornelius A. van der Jeugd |
2000-07-11 |
| 6053982 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, Cornelius A. van der Jeugd +1 more |
2000-04-25 |