Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7655093 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2010-02-02 |
| 6703592 | System of controlling the temperature of a processing chamber | — | 2004-03-09 |
| 6507007 | System of controlling the temperature of a processing chamber | — | 2003-01-14 |
| 6491757 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2002-12-10 |
| 6454866 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2002-09-24 |
| 6343183 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2002-01-29 |
| 6325858 | Long life high temperature process chamber | John F. Wengert, Ivo Raaijmakers, Mike Halpin, Loren Jacobs, Michael J. Meyer +4 more | 2001-12-04 |
| 6191399 | System of controlling the temperature of a processing chamber | — | 2001-02-20 |
| 6113702 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2000-09-05 |