| 8317921 |
In situ growth of oxide and silicon layers |
Armand P. Ferro, Ivo Raaijmakers |
2012-11-27 |
| 7655093 |
Wafer support system |
Michael Halpin, Mark Hawkins, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more |
2010-02-02 |
| 7186298 |
Wafer support system |
Michael Halpin, Mark Hawkins, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more |
2007-03-06 |
| 7112538 |
In situ growth of oxide and silicon layers |
Armand P. Ferro, Ivo Raaijmakers |
2006-09-26 |
| 7105055 |
In situ growth of oxide and silicon layers |
Armand P. Ferro, Ivo Raaijmakers |
2006-09-12 |
| 6749687 |
In situ growth of oxide and silicon layers |
Armand P. Ferro, Ivo Raaijmakers |
2004-06-15 |
| 6692576 |
Wafer support system |
Michael Halpin, Mark Hawkins, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more |
2004-02-17 |
| 6608287 |
Process chamber with rectangular temperature compensation ring |
Michael Halpin |
2003-08-19 |
| 6491757 |
Wafer support system |
Michael Halpin, Mark Hawkins, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more |
2002-12-10 |
| 6464792 |
Process chamber with downstream getter plate |
John F. Wengert, Loren Jacobs, Michael Halpin, Cornelius A. van der Jeugd, Robert Vyne +1 more |
2002-10-15 |
| 6454866 |
Wafer support system |
Michael Halpin, Mark Hawkins, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more |
2002-09-24 |
| 6343183 |
Wafer support system |
Michael Halpin, Mark Hawkins, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more |
2002-01-29 |
| 6203622 |
Wafer support system |
Michael Halpin, Mark Hawkins, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more |
2001-03-20 |
| 6113702 |
Wafer support system |
Michael Halpin, Mark Hawkins, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more |
2000-09-05 |
| 6093252 |
Process chamber with inner support |
John F. Wengert, Loren Jacobs, Michael Halpin, Cornelius A. van der Jeugd, Robert Vyne +1 more |
2000-07-25 |
| 6086680 |
Low-mass susceptor |
Cornelius A. van der Jeugd, John F. Wengert |
2000-07-11 |
| 6053982 |
Wafer support system |
Michael Halpin, Mark Hawkins, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more |
2000-04-25 |
| 4720395 |
Low temperature silicon nitride CVD process |
— |
1988-01-19 |
| 4548159 |
Chemical vapor deposition wafer boat |
Robert Herring |
1985-10-22 |