| 10343907 |
Method and system for delivering hydrogen peroxide to a semiconductor processing chamber |
Bert Jongbloed, Dieter Pierreux, Lucian Jdira, Radko G. Bankras, Theodorus G.M. Oosterlaken |
2019-07-09 |
| 9837271 |
Process for forming silicon-filled openings with a reduced occurrence of voids |
Steven R. A. Van Aerde, Theodorus G.M. Oosterlaken, Frank Huussen |
2017-12-05 |
| 9552979 |
Cyclic aluminum nitride deposition in a batch reactor |
Werner Knaepen, Bert Jongbloed, Dieter Pierreux, Peter Zagwijn, Hessel Sprey +4 more |
2017-01-24 |
| 9443730 |
Process for forming silicon-filled openings with a reduced occurrence of voids |
Steven R. A. Van Aerde, Theodorus G.M. Oosterlaken |
2016-09-13 |
| 9431238 |
Reactive curing process for semiconductor substrates |
Bert Jongbloed, Dieter Pierreux, Herbert Terhorst, Lucian Jdira, Radko G. Bankras +1 more |
2016-08-30 |
| 7691750 |
Methods of forming films in semiconductor devices with solid state reactants |
Ernest H. A. Granneman, Vladimir Kuznetsov, Xavier Pages |
2010-04-06 |
| 7655093 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more |
2010-02-02 |
| 7645486 |
Method of manufacturing a silicon dioxide layer |
Konstantin Bourdelle, Nicolas Daval, Ian Cayrefourcq, Steven R. A. Van Aerde, Marinus De Blank |
2010-01-12 |
| 7629270 |
Remote plasma activated nitridation |
Johan Swerts, Hilde De Witte, Jan Willem Maes, Christophe Pomarede, Ruben Haverkort +3 more |
2009-12-08 |
| 7294582 |
Low temperature silicon compound deposition |
Ruben Haverkort, Yuet Wan, Marinus De Blank, Jacobus Johannes Beulens, Michael A. Todd +3 more |
2007-11-13 |
| 7186298 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +1 more |
2007-03-06 |
| 7153772 |
Methods of forming silicide films in semiconductor devices |
Ernst H. A. Granneman, Vladimir Kuznetsov, Xavier Pages |
2006-12-26 |
| 6692576 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +1 more |
2004-02-17 |
| 6491757 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more |
2002-12-10 |
| 6464792 |
Process chamber with downstream getter plate |
John F. Wengert, Loren Jacobs, Michael Halpin, Derrick W. Foster, Robert Vyne +1 more |
2002-10-15 |
| 6454866 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more |
2002-09-24 |
| 6343183 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more |
2002-01-29 |
| 6335280 |
Tungsten silicide deposition process |
— |
2002-01-01 |
| 6203622 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +1 more |
2001-03-20 |
| 6126744 |
Method and system for adjusting semiconductor processing equipment |
Mark Hawkins, Robert Vyne |
2000-10-03 |
| 6113702 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more |
2000-09-05 |
| 6093252 |
Process chamber with inner support |
John F. Wengert, Loren Jacobs, Michael Halpin, Derrick W. Foster, Robert Vyne +1 more |
2000-07-25 |
| 6086680 |
Low-mass susceptor |
Derrick W. Foster, John F. Wengert |
2000-07-11 |
| 6053982 |
Wafer support system |
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +1 more |
2000-04-25 |