Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12363818 | EUV radiation system including maximizing droplet velocity change transverse to main pulse propagation | Gijs Dingemans, Colm O'Gorman | 2025-07-15 |
| 7629270 | Remote plasma activated nitridation | Johan Swerts, Hilde De Witte, Jan Willem Maes, Christophe Pomarede, Yuet Wan +3 more | 2009-12-08 |
| 7294582 | Low temperature silicon compound deposition | Yuet Wan, Marinus De Blank, Cornelius A. van der Jeugd, Jacobus Johannes Beulens, Michael A. Todd +3 more | 2007-11-13 |