Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412759 | Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatus | Gijsbert Hendrik Ronner, Christianus G.M. de Ridder, Theodorus G.M. Oosterlaken, Klaas P. Boonstra, Jeroen de Jonge +1 more | 2025-09-09 |
| 12366410 | Apparatus for processing a plurality of substrates provided with an extractor chamber | Theodorus G.M. Oosterlaken, Adriaan Garssen, Herbert Terhorst | 2025-07-22 |
| 12243757 | Flange and apparatus for processing substrates | Jeroen de Jonge, Sumit Sachdeva, Julien Laurentius Antonius Maria Keijser, Theodorus G.M. Oosterlaken | 2025-03-04 |
| 12195852 | Substrate processing apparatus with an injector | Kornelius Haanstra, Chris G. M. de Ridder, Robin Roelofs, Werner Knaepen, Herbert Terhorst | 2025-01-14 |
| 12077854 | Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas | Dieter Pierreux, Theodorus G.M. Oosterlaken, Herbert Terhorst, Bert Jongbloed | 2024-09-03 |
| 11971217 | Batch furnace assembly and method of operating a batch furnace assembly | Theodorus G.M. Oosterlaken, Herbert Terhorst | 2024-04-30 |
| 11891696 | Injector configured for arrangement within a reaction chamber of a substrate processing apparatus | Chris G. M. de Ridder | 2024-02-06 |
| 11830730 | Layer forming method and apparatus | Arjen Klaver, Werner Knaepen, Gido Van Der Star, Ruslan Kvetny | 2023-11-28 |
| 11230766 | Substrate processing apparatus and method | Dieter Pierreux, Cornelis Thaddeus Herbschleb, Werner Knaepen, Bert Jongbloed, Steven R. A. Van Aerde +3 more | 2022-01-25 |
| 10954597 | Atomic layer deposition apparatus | Chris G. M. de Ridder, Bert Jongbloed, Jeroen A. Smeltink | 2021-03-23 |
| 10900122 | Apparatus for semiconductor wafer processing | John Kevin Shugrue, Chris G. M. de Ridder | 2021-01-26 |
| 10858738 | Wafer boat cooldown device | Chris G. M. de Ridder, Bartholomeus Hans Louis Lindeboom | 2020-12-08 |
| 10844484 | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods | Herbert Terhorst, Naoto Tsuji, Yoshio Susa | 2020-11-24 |
| 10683571 | Gas supply manifold and method of supplying gases to chamber using same | Herbert Terhorst, Michael Halpin, Carl Louis White, Todd Robert Dunn, Eric James Shero +3 more | 2020-06-16 |
| 10605530 | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace | Chris G. M. de Ridder, Theodorus G.M. Oosterlaken, Klaas P. Boonstra, Herbert Terhorst, Juul Keijser | 2020-03-31 |
| 10343907 | Method and system for delivering hydrogen peroxide to a semiconductor processing chamber | Bert Jongbloed, Dieter Pierreux, Cornelius A. van der Jeugd, Radko G. Bankras, Theodorus G.M. Oosterlaken | 2019-07-09 |
| 10103040 | Apparatus and method for manufacturing a semiconductor device | Theodorus G.M. Oosterlaken, Chris G. M. de Ridder | 2018-10-16 |
| 9431238 | Reactive curing process for semiconductor substrates | Bert Jongbloed, Dieter Pierreux, Cornelius A. van der Jeugd, Herbert Terhorst, Radko G. Bankras +1 more | 2016-08-30 |
| 9153466 | Wafer boat | Arjen Klaver, Klaas P. Boonstra, Chris G. M. de Ridder, Theodorus G.M. Oosterlaken | 2015-10-06 |
| 8398773 | Thermal processing furnace and liner for the same | Noureddine Adjeroud | 2013-03-19 |