Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195852 | Substrate processing apparatus with an injector | Kornelius Haanstra, Lucian Jdira, Robin Roelofs, Werner Knaepen, Herbert Terhorst | 2025-01-14 |
| 12183602 | Substrate processing apparatus for processing substrates | Theodorus G.M. Oosterlaken | 2024-12-31 |
| 11993847 | Injector | Klaas P. Boonstra, Theodorus G.M. Oosterlaken | 2024-05-28 |
| 11891696 | Injector configured for arrangement within a reaction chamber of a substrate processing apparatus | Lucian Jdira | 2024-02-06 |
| 11876008 | Vertical batch furnace assembly | — | 2024-01-16 |
| 11735445 | Substrate processing apparatus for processing substrates | Theodorus G.M. Oosterlaken | 2023-08-22 |
| 11587815 | Vertical batch furnace assembly | Theodorus G.M. Oosterlaken | 2023-02-21 |
| 11587814 | Vertical batch furnace assembly | — | 2023-02-21 |
| 11230766 | Substrate processing apparatus and method | Dieter Pierreux, Cornelis Thaddeus Herbschleb, Werner Knaepen, Bert Jongbloed, Steven R. A. Van Aerde +3 more | 2022-01-25 |
| 11227782 | Vertical batch furnace assembly | — | 2022-01-18 |
| 11121014 | Dummy wafer storage cassette | Theodorus G.M. Oosterlaken, Adriaan Garssen | 2021-09-14 |
| 11087997 | Substrate processing apparatus for processing substrates | Theodorus G.M. Oosterlaken | 2021-08-10 |
| 11049751 | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith | — | 2021-06-29 |
| 10954597 | Atomic layer deposition apparatus | Lucian Jdira, Bert Jongbloed, Jeroen A. Smeltink | 2021-03-23 |
| 10900122 | Apparatus for semiconductor wafer processing | John Kevin Shugrue, Lucian Jdira | 2021-01-26 |
| 10858738 | Wafer boat cooldown device | Lucian Jdira, Bartholomeus Hans Louis Lindeboom | 2020-12-08 |
| 10605530 | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace | Lucian Jdira, Theodorus G.M. Oosterlaken, Klaas P. Boonstra, Herbert Terhorst, Juul Keijser | 2020-03-31 |
| 10224222 | Assembly of liner and flange for vertical furnace as well as a vertical process furnace | Theodorus G.M. Oosterlaken, Klaas P. Boonstra | 2019-03-05 |
| 10103040 | Apparatus and method for manufacturing a semiconductor device | Theodorus G.M. Oosterlaken, Lucian Jdira | 2018-10-16 |
| 9991139 | Modular vertical furnace processing system | Theodorus G.M. Oosterlaken, Bert Jongbloed | 2018-06-05 |
| 9153466 | Wafer boat | Lucian Jdira, Arjen Klaver, Klaas P. Boonstra, Theodorus G.M. Oosterlaken | 2015-10-06 |
| 9018567 | Wafer processing apparatus with heated, rotating substrate support | Klaas P. Boonstra, Theodorus Gerardus Maria Oosterlaken, Barend J. T. Ravenhorst | 2015-04-28 |
| 8641350 | Wafer boat assembly, loading apparatus comprising such a wafer boat assembly and method for loading a vertical furnace | — | 2014-02-04 |
| 8455293 | Method for processing solar cell substrates | Klaas P. Boonstra, Adriaan Garssen, Frank Huussen | 2013-06-04 |
| 7351057 | Door plate for furnace | Bart Berenbak | 2008-04-01 |