Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9018567 | Wafer processing apparatus with heated, rotating substrate support | Chris G. M. de Ridder, Klaas P. Boonstra, Theodorus Gerardus Maria Oosterlaken | 2015-04-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9018567 | Wafer processing apparatus with heated, rotating substrate support | Chris G. M. de Ridder, Klaas P. Boonstra, Theodorus Gerardus Maria Oosterlaken | 2015-04-28 |