Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276023 | Showerhead assembly for distributing a gas within a reaction chamber | Melvin Verbaas, Jereld Lee Winkler, Carl Louis White | 2025-04-15 |
| 12234552 | Semiconductor processing apparatus and methods for monitoring and controlling a semiconductor processing apparatus | Mohith Verghese, Todd Robert Dunn | 2025-02-25 |
| 12217979 | Temperature controlled substrate carrier and polishing components | Daniel Ray Trojan | 2025-02-04 |
| 12145236 | Containment and exhaust system for substrate polishing components | Daniel Ray Trojan | 2024-11-19 |
| 11939673 | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment | Carl Louis White | 2024-03-26 |
| 11891693 | Systems and methods for controlling vapor phase processing | Jereld Lee Winkler, Cheuk Li, Michael F. Schultz | 2024-02-06 |
| 11795545 | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same | — | 2023-10-24 |
| 11629406 | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate | Mohith Verghese, Todd Robert Dunn | 2023-04-18 |
| 11626313 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, Kyle Fondurulia | 2023-04-11 |
| 10975470 | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment | Carl Louis White | 2021-04-13 |
| 10941490 | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same | — | 2021-03-09 |
| 10900122 | Apparatus for semiconductor wafer processing | Lucian Jdira, Chris G. M. de Ridder | 2021-01-26 |
| 10872804 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, Kyle Fondurulia, David Marquardt | 2020-12-22 |
| 10872803 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Carl Louis White, Kyle Fondurulia | 2020-12-22 |
| 10774422 | Systems and methods for controlling vapor phase processing | Jereld Lee Winkler, Cheuk Li, Michael F. Schultz | 2020-09-15 |
| 10767789 | Diaphragm valves, valve components, and methods for forming valve components | — | 2020-09-08 |
| 10561975 | Variable conductance gas distribution apparatus and method | — | 2020-02-18 |
| 9657845 | Variable conductance gas distribution apparatus and method | — | 2017-05-23 |
| 9404587 | Lockout tagout for semiconductor vacuum valve | Ron Moen | 2016-08-02 |
| 9117866 | Apparatus and method for calculating a wafer position in a processing chamber under process conditions | David Marquardt | 2015-08-25 |
| 7189140 | Methods using eddy current for calibrating a CMP tool | Nikolay Korovin, Robert J. Stoya | 2007-03-13 |
| 6989752 | Methods and apparatus for a security system | — | 2006-01-24 |
| 6095158 | Anhydrous HF in-situ cleaning process of semiconductor processing chambers | — | 2000-08-01 |
| 5770469 | Method for forming semiconductor structure using modulation doped silicate glasses | Kevin J. Uram, Nathan Sandler, Son V. Nguyen, Matthias Ilg | 1998-06-23 |