Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8268135 | Method and apparatus for electrochemical planarization of a workpiece | Ismail Emesh, Saket Chadda, Brian L. Mueller | 2012-09-18 |
| 7198545 | Method of calibration and data evaluation for eddy current metrology systems | Robert J. Stoya | 2007-04-03 |
| 7189140 | Methods using eddy current for calibrating a CMP tool | Robert J. Stoya, John Kevin Shugrue | 2007-03-13 |
| 7140956 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Stephen C. Schultz, John D. Herb, James L. Farmer | 2006-11-28 |
| 7025664 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Stephen C. Schultz, John D. Herb, James L. Farmer | 2006-04-11 |
| 7014541 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Stephen C. Schultz, John D. Herb, James L. Farmer | 2006-03-21 |
| 6974525 | Method and apparatus for electrochemical planarization of a workpiece | Ismail Emesh, Saket Chadda, Brian L. Mueller | 2005-12-13 |
| 6953382 | Methods and apparatuses for conditioning polishing surfaces utilized during CMP processing | Robert J. Stoya | 2005-10-11 |
| 6951597 | Dynamic polishing fluid delivery system for a rotational polishing apparatus | — | 2005-10-04 |
| 6932671 | Method for controlling a chemical mechanical polishing (CMP) operation | Stephen C. Schultz | 2005-08-23 |
| 6790123 | Method for processing a work piece in a multi-zonal processing apparatus | Stephen C. Schultz | 2004-09-14 |
| 6736952 | Method and apparatus for electrochemical planarization of a workpiece | Ismail Emesh, Saket Chadda, Brian L. Mueller | 2004-05-18 |
| 6659850 | Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece | Stephen C. Schultz, John D. Herb, James L. Farmer | 2003-12-09 |
| 6612903 | Workpiece carrier with adjustable pressure zones and barriers | Stephen C. Schultz, John D. Herb, James L. Farmer | 2003-09-02 |
| 6582277 | Method for controlling a process in a multi-zonal apparatus | — | 2003-06-24 |
| 6572755 | Method and apparatus for electrochemically depositing a material onto a workpiece surface | Ismail Emesh, Saket Chadda, Brian L. Mueller | 2003-06-03 |
| 6544103 | Method to determine optimum geometry of a multizone carrier | — | 2003-04-08 |
| 6508694 | Multi-zone pressure control carrier | — | 2003-01-21 |
| 6503767 | Process for monitoring a process, planarizing a surface, and for quantifying the results of a planarization process | — | 2003-01-07 |
| 6468131 | Method to mathematically characterize a multizone carrier | — | 2002-10-22 |
| 6390905 | Workpiece carrier with adjustable pressure zones and barriers | Stephen C. Schultz, John D. Herb, James L. Farmer | 2002-05-21 |
| 6336853 | Carrier having pistons for distributing a pressing force on the back surface of a workpiece | Stephen C. Schultz, John D. Herb | 2002-01-08 |