| 7402098 |
Carrier head for workpiece planarization/polishing |
Brian Severson, John F. Stumpf |
2008-07-22 |
| 7335092 |
Carrier head for workpiece planarization/polishing |
Brian Severson, John F. Stumpf |
2008-02-26 |
| 7140956 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Nikolay Korovin, John D. Herb, James L. Farmer |
2006-11-28 |
| 7040957 |
Platen and manifold for polishing workpieces |
John D. Herb, Dave Marquardt |
2006-05-09 |
| 7025664 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Nikolay Korovin, John D. Herb, James L. Farmer |
2006-04-11 |
| 7014541 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Nikolay Korovin, John D. Herb, James L. Farmer |
2006-03-21 |
| 6932671 |
Method for controlling a chemical mechanical polishing (CMP) operation |
Nikolay Korovin |
2005-08-23 |
| 6878039 |
Polishing pad window for a chemical-mechanical polishing tool |
Charles C. Yang, John D. Herb |
2005-04-12 |
| 6790123 |
Method for processing a work piece in a multi-zonal processing apparatus |
Nikolay Korovin |
2004-09-14 |
| 6758939 |
Laminated wear ring |
David Marquardt, Wayne Lougher |
2004-07-06 |
| 6659850 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Nikolay Korovin, John D. Herb, James L. Farmer |
2003-12-09 |
| 6612903 |
Workpiece carrier with adjustable pressure zones and barriers |
Nikolay Korovin, John D. Herb, James L. Farmer |
2003-09-02 |
| 6599175 |
Apparatus for distributing a fluid through a polishing pad |
John D. Herb |
2003-07-29 |
| 6568991 |
Method and apparatus for sensing a wafer in a carrier |
John D. Herb, Ned Teeny |
2003-05-27 |
| 6540592 |
Carrier head with reduced moment wear ring |
John D. Herb, Timothy Dyer |
2003-04-01 |
| 6500055 |
Oscillating orbital polisher and method |
John A. Adams, Everett D. Smith |
2002-12-31 |
| 6447379 |
Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor |
Robert D. Gromko, John D. Herb, James Lee, Junedong Lee |
2002-09-10 |
| 6390905 |
Workpiece carrier with adjustable pressure zones and barriers |
Nikolay Korovin, John D. Herb, James L. Farmer |
2002-05-21 |
| 6336853 |
Carrier having pistons for distributing a pressing force on the back surface of a workpiece |
John D. Herb, Nikolay Korovin |
2002-01-08 |
| 6184139 |
Oscillating orbital polisher and method |
John A. Adams, Everett D. Smith |
2001-02-06 |
| 5643061 |
Pneumatic polishing head for CMP apparatus |
Paul David Jackson |
1997-07-01 |
| 5456627 |
Conditioner for a polishing pad and method therefor |
Paul David Jackson, James E. Sanford, Glen Ong, Richard B. Rice, Parag S. Modi +1 more |
1995-10-10 |