Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447379 | Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor | Stephen C. Schultz, John D. Herb, James Lee, Junedong Lee | 2002-09-10 |
| 6280291 | Wafer sensor utilizing hydrodynamic pressure differential | Edmund Terry Lisi | 2001-08-28 |