| 7229339 |
CMP apparatus and method |
John F. Stumpf, Franklin D. Root, Brian Severson, David Marquardt, James J. Crawford +6 more |
2007-06-12 |
| 7140956 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Nikolay Korovin, Stephen C. Schultz, James L. Farmer |
2006-11-28 |
| 7040957 |
Platen and manifold for polishing workpieces |
Stephen C. Schultz, Dave Marquardt |
2006-05-09 |
| 7025664 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Nikolay Korovin, Stephen C. Schultz, James L. Farmer |
2006-04-11 |
| 7014541 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Nikolay Korovin, Stephen C. Schultz, James L. Farmer |
2006-03-21 |
| 6913528 |
Low amplitude, high speed polisher and method |
Stephen C. Schulz |
2005-07-05 |
| 6878039 |
Polishing pad window for a chemical-mechanical polishing tool |
Charles C. Yang, Stephen C. Schultz |
2005-04-12 |
| 6659850 |
Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece |
Nikolay Korovin, Stephen C. Schultz, James L. Farmer |
2003-12-09 |
| 6612903 |
Workpiece carrier with adjustable pressure zones and barriers |
Nikolay Korovin, Stephen C. Schultz, James L. Farmer |
2003-09-02 |
| 6599175 |
Apparatus for distributing a fluid through a polishing pad |
Stephen C. Schultz |
2003-07-29 |
| 6568991 |
Method and apparatus for sensing a wafer in a carrier |
Ned Teeny, Stephen C. Schultz |
2003-05-27 |
| 6540592 |
Carrier head with reduced moment wear ring |
Stephen C. Schultz, Timothy Dyer |
2003-04-01 |
| 6447379 |
Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor |
Robert D. Gromko, Stephen C. Schultz, James Lee, Junedong Lee |
2002-09-10 |
| 6390905 |
Workpiece carrier with adjustable pressure zones and barriers |
Nikolay Korovin, Stephen C. Schultz, James L. Farmer |
2002-05-21 |
| 6336853 |
Carrier having pistons for distributing a pressing force on the back surface of a workpiece |
Stephen C. Schultz, Nikolay Korovin |
2002-01-08 |