Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6568991 | Method and apparatus for sensing a wafer in a carrier | John D. Herb, Stephen C. Schultz | 2003-05-27 |
| 6418584 | Apparatus and process for cleaning a work piece | Glenn E. Peterson | 2002-07-16 |