Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12410517 | Divertless gas-dosing | — | 2025-09-09 |
| 12215989 | Differential-pressure-based flow meters | Karl Leeser | 2025-02-04 |
| 11996301 | Modular-component system for gas delivery | Damien Long, Norman Nakashima, Karl Leeser | 2024-05-28 |
| 11853026 | Configurable distributed-interlock-system | Eric Tu, Dirk Rudolph, Ales Janhar, Justin Remulla | 2023-12-26 |
| 10322384 | Counter flow mixer for process chamber | Chris Wuester | 2019-06-18 |
| 9070745 | Methods and systems for forming semiconductor laminate structures | — | 2015-06-30 |
| 8893702 | Ductile mode machining methods for hard and brittle components of plasma processing apparatuses | Timothy Dyer, David Allen Ruberg, Lihua Huang | 2014-11-25 |
| 8381601 | Transducer matrix film | — | 2013-02-26 |
| 8091437 | Transducer matrix film | — | 2012-01-10 |
| 7969316 | Child leg monitoring system and method | Laurie Stumpf | 2011-06-28 |
| 7402098 | Carrier head for workpiece planarization/polishing | Brian Severson, Stephen C. Schultz | 2008-07-22 |
| 7354335 | CMP apparatus and load cup mechanism | David Marquardt, Joe Koeth, James J. Crawford, James Ekberg, Antoni F. Jakubiec +1 more | 2008-04-08 |
| 7335092 | Carrier head for workpiece planarization/polishing | Brian Severson, Stephen C. Schultz | 2008-02-26 |
| 7229339 | CMP apparatus and method | Franklin D. Root, Brian Severson, David Marquardt, John D. Herb, James J. Crawford +6 more | 2007-06-12 |
| 6203417 | Chemical mechanical polishing tool components with improved corrosion resistance | Timothy Dyer | 2001-03-20 |