Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354335 | CMP apparatus and load cup mechanism | David Marquardt, Joe Koeth, James J. Crawford, James Ekberg, Michael Smigel +1 more | 2008-04-08 |
| 6722835 | System and method for processing semiconductor wafers including single-wafer load lock | Craig L. Stevens | 2004-04-20 |
| 4957018 | Mechanism for selectively locking and unlocking a translatable shaft | Thomas M. Daley | 1990-09-18 |
| 4903937 | Isolation valve for vacuum and non-vacuum application | Thomas M. Daley | 1990-02-27 |