Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832903 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Sokol Ibrani, Eric James Shero, Todd Robert Dunn +2 more | 2020-11-10 |
| 9892908 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Sokol Ibrani, Eric James Shero, Todd Robert Dunn +2 more | 2018-02-13 |
| 9017481 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Sokol Ibrani, Eric James Shero, Todd Robert Dunn +2 more | 2015-04-28 |
| 7040957 | Platen and manifold for polishing workpieces | Stephen C. Schultz, John D. Herb | 2006-05-09 |
| 6918824 | Uniform fluid distribution and exhaust system for a chemical-mechanical planarization device | Sooyun Joh, David Cohen, Edward J. McInerney | 2005-07-19 |