Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10832903 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Eric James Shero, Todd Robert Dunn +2 more | 2020-11-10 |
| 10009961 | Local temperature control of susceptor heater for increase of temperature uniformity | — | 2018-06-26 |
| 9892908 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Eric James Shero, Todd Robert Dunn +2 more | 2018-02-13 |
| 9017481 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Eric James Shero, Todd Robert Dunn +2 more | 2015-04-28 |
| 6838115 | Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices | Devendra Kumar, Jeffrey Womack, Vuong P. Nguyen, Jack S. Kasahara | 2005-01-04 |
| 6423947 | Thermal processing chamber for heating and cooling wafer-like objects | Jeffrey Womack, Vuong P. Nguyen, Devendra Kumar, Jack S. Kasahara | 2002-07-23 |
| 6307184 | Thermal processing chamber for heating and cooling wafer-like objects | Jeffrey Womack, Vuong P. Nguyen, Devendra Kumar, Jack S. Kasahara | 2001-10-23 |