Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838115 | Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices | Devendra Kumar, Jeffrey Womack, Vuong P. Nguyen, Sokol Ibrani | 2005-01-04 |
| 6423947 | Thermal processing chamber for heating and cooling wafer-like objects | Jeffrey Womack, Vuong P. Nguyen, Devendra Kumar, Sokol Ibrani | 2002-07-23 |
| 6307184 | Thermal processing chamber for heating and cooling wafer-like objects | Jeffrey Womack, Vuong P. Nguyen, Devendra Kumar, Sokol Ibrani | 2001-10-23 |