Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884066 | Thermal process station with heated lid | Richard Sims, Xiaoguang Zhu | 2005-04-26 |
| 6838115 | Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices | Devendra Kumar, Jeffrey Womack, Jack S. Kasahara, Sokol Ibrani | 2005-01-04 |
| 6423947 | Thermal processing chamber for heating and cooling wafer-like objects | Jeffrey Womack, Devendra Kumar, Jack S. Kasahara, Sokol Ibrani | 2002-07-23 |
| 6307184 | Thermal processing chamber for heating and cooling wafer-like objects | Jeffrey Womack, Devendra Kumar, Jack S. Kasahara, Sokol Ibrani | 2001-10-23 |
| 5427820 | Thermal control line for delivering liquid to a point of use in a photolithography system | Michael B. Biche | 1995-06-27 |