Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10745806 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Nagraj Shankar, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani, Feng Bi +3 more | 2020-08-18 |
| 10472716 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Nagraj Shankar, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani, Feng Bi +3 more | 2019-11-12 |
| 10332778 | Lift pin assembly and associated methods | Erica Sakura Strandberg Pohl, Lisa Gytri, Michael J. Janicki | 2019-06-25 |
| 9268340 | Flow balancing in gas distribution networks | Stephen Yu-Hong Lau | 2016-02-23 |
| 8925588 | Flow balancing in gas distribution networks | Stephen Yu-Hong Lau | 2015-01-06 |
| 6838115 | Thermal processing system and methods for forming low-k dielectric films suitable for incorporation into microelectronic devices | Devendra Kumar, Vuong P. Nguyen, Jack S. Kasahara, Sokol Ibrani | 2005-01-04 |
| 6423947 | Thermal processing chamber for heating and cooling wafer-like objects | Vuong P. Nguyen, Devendra Kumar, Jack S. Kasahara, Sokol Ibrani | 2002-07-23 |
| 6307184 | Thermal processing chamber for heating and cooling wafer-like objects | Vuong P. Nguyen, Devendra Kumar, Jack S. Kasahara, Sokol Ibrani | 2001-10-23 |