Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177131 | Method and apparatuses for reducing porogen accumulation from a UV-cure chamber | Lisa Gytri, Jeff Gordon, James Lee, Carmen Balderrama, Joseph Brett Harris +3 more | 2021-11-16 |
| 10584415 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Vince Wilson, Easwar Srinivasan | 2020-03-10 |
| 10354857 | High power low pressure UV bulb with plasma resistant coating | Xiaolan Chen, Matthew Mudrow, Curtis Bailey, Mitchell Lamar | 2019-07-16 |
| 10240236 | Clean resistant windows for ultraviolet thermal processing | James Lee, George Andrew Antonelli, Kevin McLaughlin, Andrew John McKerrow, Curtis Bailey +5 more | 2019-03-26 |
| 10221484 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Vince Wilson, Easwar Srinivasan | 2019-03-05 |
| 10121682 | Purging of porogen from UV cure chamber | Eugene Smargiassi, George D. Kamian, Ming Xi | 2018-11-06 |
| 10020197 | Method for reducing porogen accumulation from a UV-cure chamber | Lisa Gytri, Jeff Gordon, James Lee, Carmen Balderrama, Joseph Brett Harris +3 more | 2018-07-10 |
| 9476120 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Vince Wilson, Easwar Srinivasan | 2016-10-25 |
| 9384959 | Purging of porogen from UV cure chamber | Eugene Smargiassi, George D. Kamian, Ming Xi | 2016-07-05 |
| 9268340 | Flow balancing in gas distribution networks | Jeffrey Womack | 2016-02-23 |
| 9073100 | Method and apparatuses for reducing porogen accumulation from a UV-cure chamber | Lisa Gytri, Jeff Gordon, James Lee, Carmen Balderrama, Joseph Brett Harris +3 more | 2015-07-07 |
| 9028765 | Exhaust flow spreading baffle-riser to optimize remote plasma window clean | Lisa Gytri, James Lee | 2015-05-12 |
| 8925588 | Flow balancing in gas distribution networks | Jeffrey Womack | 2015-01-06 |
| 8734663 | Purging of porogen from UV cure chamber | Eugene Smargiassi, George D. Kamian, Ming Xi | 2014-05-27 |
| 8673080 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Vince Wilson, Easwar Srinivasan | 2014-03-18 |
| 8518210 | Purging of porogen from UV cure chamber | Eugene Smargiassi, George D. Kamian, Ming Xi | 2013-08-27 |
| 8282768 | Purging of porogen from UV cure chamber | Eugene Smargiassi, George D. Kamian, Ming Xi | 2012-10-09 |
| 8137467 | Temperature controlled showerhead | Henner Meinhold, Dan M. Doble, Vince Wilson, Easwar Srinivasan | 2012-03-20 |