Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Tony Kaushal, Krishna Birru +11 more | 2025-02-18 |
| 12163219 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Tony Kaushal, Krishna Birru +11 more | 2024-12-10 |
| 11851760 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Nick Ray Linebarger, Jr. | 2023-12-26 |
| 11725283 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Nick Ray Linebarger, Jr. | 2023-08-15 |
| 11512393 | Dynamic sheath control with edge ring lift | Jacob L. Hiester, Richard M. Blank, Michael J. Janicki | 2022-11-29 |
| 11441222 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Nick Ray Linebarger, Jr. | 2022-09-13 |
| 11365479 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Tony Kaushal, Krishna Birru +11 more | 2022-06-21 |
| 10872747 | Controlling showerhead heating via resistive thermal measurements | Nick Ray Linebarger, Jr., Easwar Srinivasan, Devon Pelkey | 2020-12-22 |
| 10851457 | PECVD deposition system for deposition on selective side of the substrate | Fayaz Shaikh, Nick Ray Linebarger, Jr. | 2020-12-01 |
| 10760158 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Tony Kaushal, Krishna Birru +11 more | 2020-09-01 |
| 10354857 | High power low pressure UV bulb with plasma resistant coating | Xiaolan Chen, Matthew Mudrow, Stephen Yu-Hong Lau, Mitchell Lamar | 2019-07-16 |
| 10240236 | Clean resistant windows for ultraviolet thermal processing | James Lee, George Andrew Antonelli, Kevin McLaughlin, Andrew John McKerrow, Alexander R. Fox +5 more | 2019-03-26 |
| 9637821 | Method for supplying vaporized precursor | Damien Slevin, Brad Laird, Ming Li, Sirish Reddy, James Sims +2 more | 2017-05-02 |
| 8628618 | Precursor vapor generation and delivery system with filters and filter monitoring system | Damien Slevin, Brad Laird, Ming Li, Sirish Reddy, James Sims +2 more | 2014-01-14 |