Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300488 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Ieva Narkeviciute, Bo Gong, Bhadri N. Varadarajan | 2025-05-13 |
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Thadeous Bamford, Curtis Bailey, Tony Kaushal, Krishna Birru +11 more | 2025-02-18 |
| 12163219 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Thadeous Bamford, Curtis Bailey, Tony Kaushal, Krishna Birru +11 more | 2024-12-10 |
| 11848199 | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill | Ieva Narkeviciute, Bo Gong, Bhadri N. Varadarajan | 2023-12-19 |
| 11761079 | Oxidation resistant protective layer in chamber conditioning | Fengyuan Lai, Bo Gong, Chen-Hua Hsu, Bhadri N. Varadarajan | 2023-09-19 |
| 11702748 | Wafer level uniformity control in remote plasma film deposition | Geoffrey Hohn, Huatan Qiu, Rachel E. Batzer, Zhe Gui | 2023-07-18 |
| 11365479 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Thadeous Bamford, Curtis Bailey, Tony Kaushal, Krishna Birru +11 more | 2022-06-21 |
| 10760158 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Thadeous Bamford, Curtis Bailey, Tony Kaushal, Krishna Birru +11 more | 2020-09-01 |
| 10297442 | Remote plasma based deposition of graded or multi-layered silicon carbide film | Bhadri N. Varadarajan, Bo Gong, Zhe Gui, Fengyuan Lai | 2019-05-21 |
| 9837270 | Densification of silicon carbide film using remote plasma treatment | Bhadri N. Varadarajan, Bo Gong, Zhe Gui, Fengyuan Lai | 2017-12-05 |