Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2025-02-18 |
| 12163219 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2024-12-10 |
| 11761079 | Oxidation resistant protective layer in chamber conditioning | Bo Gong, Guangbi Yuan, Chen-Hua Hsu, Bhadri N. Varadarajan | 2023-09-19 |
| 11365479 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2022-06-21 |
| 10760158 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2020-09-01 |
| 10297442 | Remote plasma based deposition of graded or multi-layered silicon carbide film | Bhadri N. Varadarajan, Bo Gong, Guangbi Yuan, Zhe Gui | 2019-05-21 |
| 9837270 | Densification of silicon carbide film using remote plasma treatment | Bhadri N. Varadarajan, Bo Gong, Guangbi Yuan, Zhe Gui | 2017-12-05 |
| 9512291 | High thermal conductance thermal interface materials based on nanostructured metallic network-polymer composites | Theodorian Borca-Tasciuc, Sushumna Iruvanti, Kamyar Pashayi, Joel L. Plawsky, Hafez Raeisi-Fard | 2016-12-06 |
| 9045674 | High thermal conductance thermal interface materials based on nanostructured metallic network-polymer composites | Sushumna Iruvanti, Theodorian Borca-Tasciuc, Hafez Raeisi-Fard, Kamyar Pashayi, Joel L. Plawsky | 2015-06-02 |