| 12359311 |
Conformal deposition of silicon carbide films using heterogeneous precursor interaction |
Matthew Scott Weimer, Bhadri N. Varadarajan, Bo Gong |
2025-07-15 |
| 12331402 |
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more |
2025-06-17 |
| 12334332 |
Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors |
Bhadri N. Varadarajan, Matthew Scott Weimer, Galbokka Hewage Layan Savithra, Bo Gong |
2025-06-17 |
| 12272547 |
Conformal deposition of silicon carbide films |
Bhadri N. Varadarajan, Bo Gong |
2025-04-08 |
| 12116669 |
Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
Rachel E. Batzer, Galbokka Hewage Layan Savithra |
2024-10-15 |
| 12000047 |
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more |
2024-06-04 |
| 11894227 |
Conformal deposition of silicon carbide films |
Bhadri N. Varadarajan, Bo Gong |
2024-02-06 |
| 11702748 |
Wafer level uniformity control in remote plasma film deposition |
Geoffrey Hohn, Huatan Qiu, Rachel E. Batzer, Guangbi Yuan |
2023-07-18 |
| 11608559 |
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more |
2023-03-21 |
| 11264234 |
Conformal deposition of silicon carbide films |
Bhadri N. Varadarajan, Bo Gong |
2022-03-01 |
| 11101164 |
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more |
2021-08-24 |
| 11015247 |
Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
Rachel E. Batzer, Galbokka Hewage Layan Savithra |
2021-05-25 |
| 10604841 |
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more |
2020-03-31 |
| 10325773 |
Conformal deposition of silicon carbide films |
Bhadri N. Varadarajan, Bo Gong |
2019-06-18 |
| 10319582 |
Methods and apparatus for depositing silicon oxide on metal layers |
Bhadri N. Varadarajan, Bo Gong, Andrew John McKerrow |
2019-06-11 |
| 10297442 |
Remote plasma based deposition of graded or multi-layered silicon carbide film |
Bhadri N. Varadarajan, Bo Gong, Guangbi Yuan, Fengyuan Lai |
2019-05-21 |
| 9837270 |
Densification of silicon carbide film using remote plasma treatment |
Bhadri N. Varadarajan, Bo Gong, Guangbi Yuan, Fengyuan Lai |
2017-12-05 |