Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359311 | Conformal deposition of silicon carbide films using heterogeneous precursor interaction | Matthew Scott Weimer, Bhadri N. Varadarajan, Bo Gong | 2025-07-15 |
| 12331402 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more | 2025-06-17 |
| 12334332 | Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors | Bhadri N. Varadarajan, Matthew Scott Weimer, Galbokka Hewage Layan Savithra, Bo Gong | 2025-06-17 |
| 12272547 | Conformal deposition of silicon carbide films | Bhadri N. Varadarajan, Bo Gong | 2025-04-08 |
| 12116669 | Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Galbokka Hewage Layan Savithra | 2024-10-15 |
| 12000047 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more | 2024-06-04 |
| 11894227 | Conformal deposition of silicon carbide films | Bhadri N. Varadarajan, Bo Gong | 2024-02-06 |
| 11702748 | Wafer level uniformity control in remote plasma film deposition | Geoffrey Hohn, Huatan Qiu, Rachel E. Batzer, Guangbi Yuan | 2023-07-18 |
| 11608559 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more | 2023-03-21 |
| 11264234 | Conformal deposition of silicon carbide films | Bhadri N. Varadarajan, Bo Gong | 2022-03-01 |
| 11101164 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more | 2021-08-24 |
| 11015247 | Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Galbokka Hewage Layan Savithra | 2021-05-25 |
| 10604841 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong +3 more | 2020-03-31 |
| 10325773 | Conformal deposition of silicon carbide films | Bhadri N. Varadarajan, Bo Gong | 2019-06-18 |
| 10319582 | Methods and apparatus for depositing silicon oxide on metal layers | Bhadri N. Varadarajan, Bo Gong, Andrew John McKerrow | 2019-06-11 |
| 10297442 | Remote plasma based deposition of graded or multi-layered silicon carbide film | Bhadri N. Varadarajan, Bo Gong, Guangbi Yuan, Fengyuan Lai | 2019-05-21 |
| 9837270 | Densification of silicon carbide film using remote plasma treatment | Bhadri N. Varadarajan, Bo Gong, Guangbi Yuan, Fengyuan Lai | 2017-12-05 |