Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334332 | Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-containing precursors | Bhadri N. Varadarajan, Matthew Scott Weimer, Bo Gong, Zhe Gui | 2025-06-17 |
| 12116669 | Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Zhe Gui | 2024-10-15 |
| 11015247 | Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Zhe Gui | 2021-05-25 |