Rachel E. Batzer — 13 Patents at Lam Research

Rachel E. Batzer has been granted 13 US patents while listed as an inventor at Lam Research. The first was granted in 2017 and the most recent in October 2025. Rachel E. Batzer ranks #362,438 of 4,157,543 US inventors in our database (top 8.7%). Patent records list Rachel E. Batzer in Tigard, OR, US.

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Showing 1–13 of 13 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
D1099688	Threaded nozzle insert	John Edward Bussan, Prasanna V. Kulkarni	2025-10-28
12362153	Pedestal setup using camera wafer	Prasanna Kulkarni, Ted TAN, Vivekanandan Krishnaswamy, Boonyarit Woonprasert, Shawn Fiedler	2025-07-15
12331402	Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition	Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong, Will Schlosser +3 more	2025-06-17
12116669	Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition	Zhe Gui, Galbokka Hewage Layan Savithra	2024-10-15	$173,043,000
12000047	Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition	Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong, Will Schlosser +3 more	2024-06-04	$167,357,000
11920239	Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma	Bhadri N. Varadarajan, Bo Gong, Huatan Qiu, Bart J. van Schravendijk, Geoffrey Hohn	2024-03-05	$158,619,000
11702748	Wafer level uniformity control in remote plasma film deposition	Geoffrey Hohn, Huatan Qiu, Guangbi Yuan, Zhe Gui	2023-07-18	$327,307,000
11608559	Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition	Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong, Will Schlosser +3 more	2023-03-21	$295,628,000
D948658	High density hole pattern dual plenum hole showerhead assembly	Aaron Miller, Aaron Durbin, Vivekanandan Krishnaswamy	2022-04-12
11101164	Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition	Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong, Will Schlosser +3 more	2021-08-24	$241,318,000
11015247	Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition	Zhe Gui, Galbokka Hewage Layan Savithra	2021-05-25	$816,543,000
10604841	Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition	Huatan Qiu, Bhadri N. Varadarajan, Patrick Breiling, Bo Gong, Will Schlosser +3 more	2020-03-31	$259,981,000
9828672	Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma	Bhadri N. Varadarajan, Bo Gong, Huatan Qiu, Bart J. van Schravendijk, Geoffrey Hohn	2017-11-28	$38,638,000

Rachel E. Batzer — 13 Patents

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