Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385138 | Plasma-enhanced deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joseph L. Womack, Dong Niu, Keith Fox +5 more | 2025-08-12 |
| 12331402 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Bo Gong, Will Schlosser +3 more | 2025-06-17 |
| 12142509 | Electrostatic chuck with seal surface | Michael Philip Roberts, Chloe Baldasseroni, Ishtak Karim, Adrien LaVoie, Ramesh Chandrasekharan | 2024-11-12 |
| 12000047 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Bo Gong, Will Schlosser +3 more | 2024-06-04 |
| 11837443 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Karl Leeser, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly | 2023-12-05 |
| 11608559 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Bo Gong, Will Schlosser +3 more | 2023-03-21 |
| 11515124 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Karl Leeser, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly | 2022-11-29 |
| 11443975 | Planar substrate edge contact with open volume equalization pathways and side containment | Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie, Chloe Baldasseroni +7 more | 2022-09-13 |
| 11232966 | Electrostatic chucking pedestal with substrate backside purging and thermal sinking | Timothy Scott Thomas, Ramesh Chandrasekharan, Vincent E. Burkhart | 2022-01-25 |
| 11101164 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Bo Gong, Will Schlosser +3 more | 2021-08-24 |
| 10984987 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Karl Leeser, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly | 2021-04-20 |
| 10655224 | Conical wafer centering and holding device for semiconductor processing | Pulkit Agarwal, Ishtak Karim, Purushottam Kumar, Adrien LaVoie, Sung Je Kim | 2020-05-19 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie, Chloe Baldasseroni +7 more | 2020-04-14 |
| 10604841 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | Rachel E. Batzer, Huatan Qiu, Bhadri N. Varadarajan, Bo Gong, Will Schlosser +3 more | 2020-03-31 |
| 10214816 | PECVD apparatus for in-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joseph L. Womack, Dong Niu, Keith Fox +5 more | 2019-02-26 |
| 9758868 | Plasma suppression behind a showerhead through the use of increased pressure | Ramesh Chandrasekharan, Edmund Minshall, Colin F. Smith, Andrew Duvall, Karl Leeser | 2017-09-12 |
| 9399228 | Method and apparatus for purging and plasma suppression in a process chamber | Kevin Gerber, Jennifer O'Loughlin, Nagraj Shankar, Pramod Subramonium | 2016-07-26 |
| 9028924 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joe Womack, Dong Niu, Keith Fox +5 more | 2015-05-12 |
| 8741394 | In-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Joe Womack, Dong Niu, Keith Fox +5 more | 2014-06-03 |
| 7854828 | Method and apparatus for electroplating including remotely positioned second cathode | Jonathan D. Reid, Seshasayee Varadarajan, Bryan L. Buckalew, Glenn Ibarreta | 2010-12-21 |
| 7413616 | Active rinse shield for electrofill chemical bath and method of use | John D Rasberry, Steve C Schlegel | 2008-08-19 |
| 7146994 | Active rinse shield for electrofill chemical bath and method of use | John D Rasberry, Steve C Schlegel | 2006-12-12 |