Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243725 | High temperature RF connection with integral thermal choke | Timothy Scott Thomas, Joel Hollingsworth, David French, Damien Slevin | 2025-03-04 |
| 12217939 | RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks | David French, Karl Leeser, Liang Meng | 2025-02-04 |
| 11990360 | Electrostatic chuck (ESC) pedestal voltage isolation | Miguel Benjamin Vasquez | 2024-05-21 |
| 11835868 | Protective coating for electrostatic chucks | Stephen Topping | 2023-12-05 |
| 11232966 | Electrostatic chucking pedestal with substrate backside purging and thermal sinking | Timothy Scott Thomas, Patrick Breiling, Ramesh Chandrasekharan | 2022-01-25 |
| 11183368 | RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks | David French, Karl Leeser, Liang Meng | 2021-11-23 |
| 11086233 | Protective coating for electrostatic chucks | Stephen Topping | 2021-08-10 |
| 10832936 | Substrate support with increasing areal density and corresponding method of fabricating | Peter J. Woytowitz, Michael Rumer, Karl Leeser | 2020-11-10 |
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Shambhu N. Roy, Natan Solomon, Sanjay Gopinath, Kaihan Ashtiani, Bart van Schravendijk +3 more | 2016-09-20 |
| 9337067 | High temperature electrostatic chuck with radial thermal chokes | Shambhu N. Roy, Scott Fields | 2016-05-10 |
| 8685215 | Mechanism for continuously varying radial position of a magnetron | Keith A. Miller, Anantha K. Subramani, Maurice E. Ewert, Tza-Jing Gung, Hong Yang | 2014-04-01 |
| 7736473 | Magnetron having continuously variable radial position | Keith A. Miller, Anantha K. Subramani, Maurice E. Ewert, Tza-Jing Gung, Hong Yang | 2010-06-15 |
| 7138039 | Liquid isolation of contact rings | Harald Herchen, Joseph Yahalom | 2006-11-21 |
| 7067045 | Method and apparatus for sealing electrical contacts during an electrochemical deposition process | Arthur Keigler, Harald Herchen, Son Trinh | 2006-06-27 |
| 7018515 | Selectable dual position magnetron | Tza-Jing Gung, Hong Yang, Anantha K. Subramani, Maurice E. Ewert, Keith A. Miller | 2006-03-28 |
| 6869516 | Method for removing electrolyte from electrical contacts and wafer touching areas | Dmitry Lubomirsky, Michael Yang, Girish Dixit, Allen L. D'Ambra, Yeuk-Fai Edwin Mok +1 more | 2005-03-22 |
| 6855235 | Anode impedance control through electrolyte flow control | Harald Herchen, Craig Brodeur, Quinwei Wu, Peter Kimball | 2005-02-15 |
| 6843897 | Anode slime reduction method while maintaining low current | Harald Herchen | 2005-01-18 |
| 6488820 | Method and apparatus for reducing migration of conductive material on a component | — | 2002-12-03 |
| 6469283 | Method and apparatus for reducing thermal gradients within a substrate support | Steven V. Sansoni, Michael Sugarman, Anthony Chih-Tung Chan | 2002-10-22 |
| 6377060 | Method and apparatus for wafer detection | Deepak Manaoharlal | 2002-04-23 |
| 6303879 | Laminated ceramic with multilayer electrodes and method of fabrication | — | 2001-10-16 |
| 6291777 | Conductive feed-through for creating a surface electrode connection within a dielectric body and method of fabricating same | Michael Sugarman | 2001-09-18 |
| 6075375 | Apparatus for wafer detection | Deepak Manaoharlal | 2000-06-13 |
| D425919 | Electrostatic chuck with improved spacing mask and workpiece detection device | Allen Flanigan, Steven V. Sansoni | 2000-05-30 |