Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery

Assignee

• Novellus Systems

Inventors

• Shambhu N. Roy (23 patents)
• Vincent E. Burkhart (36 patents)
• Natan Solomon (4 patents)
• Sanjay Gopinath (31 patents)
• Kaihan Ashtiani (37 patents)
• Bart van Schravendijk (12 patents)
• Jason Stevens (5 patents)
• Dhritiman Subha Kashyap (21 patents)
• David Cohen (27 patents)

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