Gas distribution plate

Assignee

• Applied Materials

Inventors

• Dhritiman Subha Kashyap (21 patents)
• Chong Wang (7 patents)
• Prahallad Iyengar (10 patents)
• Kartik Shah (68 patents)
• Sanjeev Baluja (104 patents)
• Joseph AuBuchon (41 patents)

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