| 6508062 |
Thermal exchanger for a wafer chuck |
— |
2003-01-21 |
| 6258227 |
Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck |
— |
2001-07-10 |
| 6081414 |
Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system |
Michael Sugarman |
2000-06-27 |
| D425919 |
Electrostatic chuck with improved spacing mask and workpiece detection device |
Vincent E. Burkhart, Steven V. Sansoni |
2000-05-30 |
| 6053756 |
Interlock safety device |
Vince Burkhart |
2000-04-25 |
| 6051122 |
Deposition shield assembly for a semiconductor wafer processing system |
— |
2000-04-18 |
| D420023 |
Electrostatic chuck with improved spacing mask and workpiece detection device |
Steven V. Sansoni, Vincent E. Burkhart |
2000-02-01 |
| D420022 |
Electrostatic chuck with improved spacing and charge migration reduction mask |
Vincent E. Burkhart, Steven V. Sansoni |
2000-02-01 |
| D407073 |
Electrostatic chuck with improved spacing and charge migration reduction mask |
Vincent E. Burkhart, Steven V. Sansoni |
1999-03-23 |
| D406852 |
Electrostatic chuck with improved spacing mask and workpiece detection device |
Vincent E. Burkhart, Steven V. Sansoni |
1999-03-16 |
| 5863396 |
Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck |
— |
1999-01-26 |
| 5863340 |
Deposition ring anti-rotation apparatus |
— |
1999-01-26 |
