Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D420022 | Electrostatic chuck with improved spacing and charge migration reduction mask | Allen Flanigan, Steven V. Sansoni | 2000-02-01 |
| D420023 | Electrostatic chuck with improved spacing mask and workpiece detection device | Allen Flanigan, Steven V. Sansoni | 2000-02-01 |
| 5982607 | Monopolar electrostatic chuck having an electrode in contact with a workpiece | Stefanie Harvey | 1999-11-09 |
| 5923521 | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | — | 1999-07-13 |
| 5886865 | Method and apparatus for predicting failure of an eletrostatic chuck | Vijay D. Parkhe, Steven V. Sansoni | 1999-03-23 |
| D407073 | Electrostatic chuck with improved spacing and charge migration reduction mask | Allen Flanigan, Steven V. Sansoni | 1999-03-23 |
| D406852 | Electrostatic chuck with improved spacing mask and workpiece detection device | Allen Flanigan, Steven V. Sansoni | 1999-03-16 |
| 5825607 | Insulated wafer spacing mask for a substrate support chuck and method of fabricating same | — | 1998-10-20 |
| 5764471 | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | — | 1998-06-09 |
| 5745332 | Monopolar electrostatic chuck having an electrode in contact with a workpiece | Stefanie Harvey | 1998-04-28 |
| 5656093 | Wafer spacing mask for a substrate support chuck and method of fabricating same | Michael Sugarman, Howard Grunes | 1997-08-12 |