Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466895 | Defect reference system automatic pattern classification | Terry Reiss | 2002-10-15 |
| 5982607 | Monopolar electrostatic chuck having an electrode in contact with a workpiece | Vincent E. Burkhart | 1999-11-09 |
| 5745332 | Monopolar electrostatic chuck having an electrode in contact with a workpiece | Vincent E. Burkhart | 1998-04-28 |