Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7337019 | Integration of fault detection with run-to-run control | Arulkumar Shanmugasundram, Alexander T. Schwarm | 2008-02-26 |
| 6952656 | Wafer fabrication data acquisition and management systems | Sherry Cordova, Terry Doyle, Natalia Kroupnova, Evgueni Lobovski, Inna Louneva +5 more | 2005-10-04 |
| 6895293 | Fault detection and virtual sensor methods for tool fault monitoring | Dimitris Lymberopoulos | 2005-05-17 |
| 6625513 | Run-to-run control over semiconductor processing tool based upon mirror image target | Dimitris Lymberopoulos, Arulkumar Shanmugasundram | 2003-09-23 |
| 6466895 | Defect reference system automatic pattern classification | Stefanie Harvey | 2002-10-15 |