Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8694145 | Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles | Alexander T. Schwarm, Gopalakrishna B. Prabhu | 2014-04-08 |
| 8308858 | Electroless deposition process on a silicon contact | Michael P. Stewart, Timothy Weidman, David Eaglesham | 2012-11-13 |
| 8070909 | Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles | Alexander T. Schwarm, Gopalakrishna B. Prabhu | 2011-12-06 |
| 8005634 | Copper wiring module control | Suketu Arun Parikh | 2011-08-23 |
| 7970588 | Method, system and medium for controlling manufacturing process using adaptive models based on empirical data | Yuri Kokotov, Alexander T. Schwarm, Efim Entin, Jacques Seror, Jehuda Hartman +2 more | 2011-06-28 |
| 7966087 | Method, system and medium for controlling manufacture process having multivariate input parameters | Yuri Kokotov, Efim Entin, Jacques Seror, Yossi Fisher, Shalomo Sarel +2 more | 2011-06-21 |
| 7910476 | Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop | Hongbin Fang, Timothy Weidman, Fang Mei, Yaxin Wang, Christopher Dennis Bencher +1 more | 2011-03-22 |
| 7827930 | Apparatus for electroless deposition of metals onto semiconductor substrates | Dmitry Lubomirsky, Russell C. Ellwanger, Ian Pancham, Ramakrishna Cheboli, Timothy Weidman | 2010-11-09 |
| 7783375 | Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing | Alexander T. Schwarm | 2010-08-24 |
| 7725208 | Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing | Alexander T. Schwarm | 2010-05-25 |
| 7698012 | Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing | Alexander T. Schwarm | 2010-04-13 |
| 7668702 | Method, system and medium for controlling manufacturing process using adaptive models based on empirical data | Yuri Kokotov, Alexander T. Schwarm, Efim Entin, Jacques Seror, Jehuda Hartman +2 more | 2010-02-23 |
| 7659203 | Electroless deposition process on a silicon contact | Michael P. Stewart, Timothy Weidman, David Eaglesham | 2010-02-09 |
| 7654221 | Apparatus for electroless deposition of metals onto semiconductor substrates | Dmitry Lubomirsky, Ian Pancham | 2010-02-02 |
| 7651934 | Process for electroless copper deposition | Dmitry Lubomirsky, Timothy Weidman, Nicolay Kovarsky, Kapila Wijekoon | 2010-01-26 |
| 7542132 | Raman spectroscopy as integrated chemical metrology | Hongbin Fang, Josh H. Golden, Timothy Weidman, Yaxin Wang | 2009-06-02 |
| 7534298 | Apparatus and method of detecting the electroless deposition endpoint | Manoocher Birang, Ian Pancham, Sergey Lopatin | 2009-05-19 |
| 7514353 | Contact metallization scheme using a barrier layer over a silicide layer | Timothy Weidman, Kapila Wijekoon, Zhize Zhu, Avgerinos V. Gelatos, Amit Khandelwal +3 more | 2009-04-07 |
| 7473339 | Slim cell platform plumbing | Allen L. D'Ambra, Michael Yang, Yevgeniy Rabinovich, Dmitry Lubomirsky | 2009-01-06 |
| 7341633 | Apparatus for electroless deposition | Dmitry Lubomirsky, Ian Pancham, Sergey Lopatin | 2008-03-11 |
| 7337019 | Integration of fault detection with run-to-run control | Terry Reiss, Alexander T. Schwarm | 2008-02-26 |
| 7323058 | Apparatus for electroless deposition of metals onto semiconductor substrates | Dmitry Lubomirsky, Russell C. Ellwanger, Ian Pancham, Ramakrishna Cheboli | 2008-01-29 |
| 7273813 | Wafer cleaning solution for cobalt electroless application | Ramin Emami, Timothy Weidman, Sergey Lopatin, Hongbin Fang | 2007-09-25 |
| 7272459 | Method, system and medium for controlling manufacture process having multivariate input parameters | Yuri Kokotov, Efim Entin, Jacques Seror, Yossi Fisher, Shalomo Sarel +2 more | 2007-09-18 |
| 7256111 | Pretreatment for electroless deposition | Sergey Lopatin, Ramin Emami, Hongbin Fang | 2007-08-14 |